Recorded: June, 2016
Airborne molecular contaminants (AMC) cause major product quality issues in modern semiconductor fabrication, even at very low levels (ppb concentrations and below). Currently multiple different tools are used to detect certain classes of AMCs with varying degrees of effectiveness.
Selected ion flow tube mass spectrometry (SIFT-MS) is a unique analytical tool that provides comprehensive, high-sensitivity detection of volatile organic, and semivolatile organic compounds (VOCs and SVOCs), and inorganic gases (including HCl, HF, and SOx) within seconds. As a single, comprehensive tool with rapid analysis, SIFT-MS provides great economic benefit because it detects and identifies issues faster, resulting in reduced product losses. This webinar will introduce the SIFT-MS technique and its application to AMC monitoring.
About Syft Technologies
Vaughan Langford, Ph.D.,
Director of Applications & Marketing,
Vaughan manages Syft’s Application Development department, which includes responsibility for Syft’s marketing collateral. Vaughan joined Syft in 2002 after completing his PhD in Physical Chemistry at the University of Canterbury (1997) and post-doctoral fellowships at the Universities of Geneva, Western Australia, and Canterbury. As manager of Syft’s contract laboratory, Vaughan has worked extensively with customers to understand their analysis needs and develop market-tested SIFT-MS solutions. Vaughan has experience across all SIFT-MS application areas, but has focused particularly on food industry and air quality (including semiconductor) applications.